Understanding Ultra Low-k Dielectric Films

Dielectric materials are of critical importance in the function of microelectronic devices. This article outlines why and the mechanical characterization of Ultra Low-k Dielectric Films.

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Understanding Ultra Low-k Dielectric Films

Thermally conductive ultra-low-k dielectric layers based on two-dimensional covalent organic frameworks

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Understanding Ultra Low-k Dielectric Films

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Schematic diagrams of porous low- k dielectric materials showing ͑ a ͒

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PDF) Effect of low-frequency radio frequency on plasma-enhanced chemical vapor deposited ultra low-dielectric films for very large-scale integrated interconnects